The Effect of pressure and gas species on Electron Cyclotron Resonance (ECR) in a weakly magnetized Inductively Coupled Plasma(ICP)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung, W | - |
| dc.contributor.author | Kim, SS | - |
| dc.contributor.author | Lee, SW | - |
| dc.contributor.author | You, SJ | - |
| dc.contributor.author | Chang, Hong-Young | - |
| dc.date.accessioned | 2013-03-16T21:11:54Z | - |
| dc.date.available | 2013-03-16T21:11:54Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-10 | - |
| dc.identifier.citation | 54th Annual Gaseous Electronics Conference, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135913 | - |
| dc.language | ENG | - |
| dc.title | The Effect of pressure and gas species on Electron Cyclotron Resonance (ECR) in a weakly magnetized Inductively Coupled Plasma(ICP) | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 54th Annual Gaseous Electronics Conference | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
| dc.contributor.nonIdAuthor | Chung, W | - |
| dc.contributor.nonIdAuthor | Kim, SS | - |
| dc.contributor.nonIdAuthor | Lee, SW | - |
| dc.contributor.nonIdAuthor | You, SJ | - |
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