Deep X-ray 경사공정을 이용한 초소형 삼면 반사체 제작

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Publisher
대한기계학회
Issue Date
2000
Language
KOR
Citation

제 2회 MEMS 학술대회, pp.185 - 190

URI
http://hdl.handle.net/10203/135827
Appears in Collection
ME-Conference Papers(학술회의논문)
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