An Audio Frequency Filter Appilication of Micromachined Thermally-Isolated Diaphragm Structures
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Euisik Yoon | - |
| dc.date.accessioned | 2013-03-16T20:57:51Z | - |
| dc.date.available | 2013-03-16T20:57:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | IEEE MEMS 2000 Conference, v., no., pp.142 - 147 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135781 | - |
| dc.language | ENG | - |
| dc.title | An Audio Frequency Filter Appilication of Micromachined Thermally-Isolated Diaphragm Structures | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 142 | - |
| dc.citation.endingpage | 147 | - |
| dc.citation.publicationname | IEEE MEMS 2000 Conference | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Euisik Yoon | - |
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