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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Fabrication of c-axis oriented ZnO/AlN thin films prepared by radio frequency reactive sputtering and development of ZnO/AlN layered structure surface acoustic wave devices

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dc.contributor.authorYong Y.-J.-
dc.contributor.authorKang Y.-S.-
dc.contributor.authorLee P.S.-
dc.contributor.authorLee, Jai Young-
dc.date.accessioned2013-03-16T20:43:02Z-
dc.date.available2013-03-16T20:43:02Z-
dc.date.created2012-02-06-
dc.date.issued2001-04-22-
dc.identifier.citation6th International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, v.20, no.1, pp.42 - 46-
dc.identifier.issn1071-1023-
dc.identifier.urihttp://hdl.handle.net/10203/135630-
dc.languageENG-
dc.titleFabrication of c-axis oriented ZnO/AlN thin films prepared by radio frequency reactive sputtering and development of ZnO/AlN layered structure surface acoustic wave devices-
dc.typeConference-
dc.identifier.scopusid2-s2.0-0036124758-
dc.type.rimsCONF-
dc.citation.volume20-
dc.citation.issue1-
dc.citation.beginningpage42-
dc.citation.endingpage46-
dc.citation.publicationname6th International Workshop on Fabrication, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorLee, Jai Young-
dc.contributor.nonIdAuthorYong Y.-J.-
dc.contributor.nonIdAuthorKang Y.-S.-
dc.contributor.nonIdAuthorLee P.S.-
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MS-Conference Papers(학술회의논문)
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