DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Chong-Ook | - |
dc.contributor.author | Lee, Joo-Hyeon | - |
dc.contributor.author | Kim, Hyuk | - |
dc.contributor.author | Lee, Yeon-Seong | - |
dc.contributor.author | Rha, Sa-Kyun | - |
dc.contributor.author | Lee, Won-Jun | - |
dc.date.accessioned | 2013-03-16T20:24:47Z | - |
dc.date.available | 2013-03-16T20:24:47Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002 | - |
dc.identifier.citation | AVS Topical Conference ALD 2002, v., no., pp.P-14 - | - |
dc.identifier.uri | http://hdl.handle.net/10203/135462 | - |
dc.language | ENG | - |
dc.title | Atomic Layer Deposition of Silicon Nitride Thin Film | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | P-14 | - |
dc.citation.publicationname | AVS Topical Conference ALD 2002 | - |
dc.contributor.localauthor | Park, Chong-Ook | - |
dc.contributor.nonIdAuthor | Lee, Joo-Hyeon | - |
dc.contributor.nonIdAuthor | Kim, Hyuk | - |
dc.contributor.nonIdAuthor | Lee, Yeon-Seong | - |
dc.contributor.nonIdAuthor | Rha, Sa-Kyun | - |
dc.contributor.nonIdAuthor | Lee, Won-Jun | - |
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