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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

마이크로웨이브 플라즈마 가열에 의한 비정질 실리콘 / 미세 결정질 실리콘 이층박막의 고상결정화

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이재영
Issue Date
1999
Language
KOR
Citation

대한금속학회 추계학술대회

URI
http://hdl.handle.net/10203/135457
Appears in Collection
MS-Conference Papers(학술회의논문)
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