(Pb,Sr)TiO3(PST) thin films for ULSI DRAM capacitor prepared by liquid source misted chemical deposition(LSMCD)액적화학증착법을 이용한 초고집적 DRAM capacitor용 (Pb,Sr)TiO3(PST) 박막
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chung, HJ | - |
| dc.contributor.author | Chung, SJ | - |
| dc.contributor.author | Woo, Seong-Ihl | - |
| dc.date.accessioned | 2013-03-16T20:02:07Z | - |
| dc.date.available | 2013-03-16T20:02:07Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | 한국화학공학회 학술발표회 , v.5, no.2, pp.4513 - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135269 | - |
| dc.language | ENG | - |
| dc.publisher | 한국화학공학회 | - |
| dc.title | (Pb,Sr)TiO3(PST) thin films for ULSI DRAM capacitor prepared by liquid source misted chemical deposition(LSMCD) | - |
| dc.title.alternative | 액적화학증착법을 이용한 초고집적 DRAM capacitor용 (Pb,Sr)TiO3(PST) 박막 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.volume | 5 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 4513 | - |
| dc.citation.publicationname | 한국화학공학회 학술발표회 | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Woo, Seong-Ihl | - |
| dc.contributor.nonIdAuthor | Chung, HJ | - |
| dc.contributor.nonIdAuthor | Chung, SJ | - |
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