Evolution of the electron energy distribution function and nonlocal electron kinetics in a planar inductive discharge.
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Chang, Hong-Young | - |
| dc.date.accessioned | 2013-03-16T19:59:51Z | - |
| dc.date.available | 2013-03-16T19:59:51Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | 5Th Asia-Pacific Conference on plasma science & Technology, 13th symposium on plasma science for materials, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135251 | - |
| dc.language | ENG | - |
| dc.publisher | plasma science & Technology | - |
| dc.title | Evolution of the electron energy distribution function and nonlocal electron kinetics in a planar inductive discharge. | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 5Th Asia-Pacific Conference on plasma science & Technology, 13th symposium on plasma science for materials | - |
| dc.identifier.conferencecountry | China | - |
| dc.identifier.conferencecountry | China | - |
| dc.contributor.localauthor | Chang, Hong-Young | - |
- Appears in Collection
- PH-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.