A High-Fidelity, Web-Based Simulator for 300mm Wafer Fabs
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jonghun Park | - |
| dc.date.accessioned | 2013-03-16T19:38:59Z | - |
| dc.date.available | 2013-03-16T19:38:59Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001 | - |
| dc.identifier.citation | IEEE International Conference on Systems, Man, and Cybernetics, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/135041 | - |
| dc.language | ENG | - |
| dc.title | A High-Fidelity, Web-Based Simulator for 300mm Wafer Fabs | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | IEEE International Conference on Systems, Man, and Cybernetics | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Jonghun Park | - |
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