High-Fidelity Rapid Prototyping of the Real-Time Fab Operations through Discrete Event System Modeling
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jonghun Park | - |
| dc.date.accessioned | 2013-03-16T18:51:55Z | - |
| dc.date.available | 2013-03-16T18:51:55Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | International Conference on Modeling and Analysis of Semiconductor Manufacturing, v., no., pp. - | - |
| dc.identifier.uri | http://hdl.handle.net/10203/134530 | - |
| dc.language | ENG | - |
| dc.title | High-Fidelity Rapid Prototyping of the Real-Time Fab Operations through Discrete Event System Modeling | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | International Conference on Modeling and Analysis of Semiconductor Manufacturing | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Jonghun Park | - |
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