DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Deuk Su | ko |
dc.contributor.author | Park, Jong Ju | ko |
dc.contributor.author | Lee, Kyoung Hwan | ko |
dc.contributor.author | Park, Juyun | ko |
dc.contributor.author | Nam, Chang Hee | ko |
dc.date.accessioned | 2009-11-26T05:34:42Z | - |
dc.date.available | 2009-11-26T05:34:42Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2009-02 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v.48 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/13428 | - |
dc.description.abstract | Using high harmonic radiation as an X-ray light source, a soft X-ray microscope with nanometer-scale spatial resolution was investigated. A transmission soft X-ray microscope was constructed using a Mo/Si multilayer concave mirror as a condenser and a Fresnel zone plate as a microscope objective. The high-order harmonic source at 13 nm, emitted from neon atoms driven by intense femtosecond laser pulses, was optimized by controlling laser chirp. Objects, patterned on 160-nm-thick hydrogen silsesquioxane coated on a 100-nm-thick Si(3)N(4) membrane, were used for imaging. The analysis of object images, captured on an X-ray charge-coupled device, showed that the spatial resolution of the microscope was about 130 nm, verifying the usefulness of the tabletop soft X-ray source. (C) 2009 The Japan Society of Applied Physics | - |
dc.description.sponsorship | This work was supported by the Acceleration Research Program of the Ministry of ducation, Science and Technology of Korea and the Korea Science and Engineering Foundation. | en |
dc.language | English | - |
dc.language.iso | en_US | en |
dc.publisher | INST PURE APPLIED PHYSICS | - |
dc.subject | GENERATION | - |
dc.subject | LIGHT | - |
dc.title | Soft X-ray Microscope Constructed with 130-nm Spatial Resolution Using a High Harmonic X-ray Source | - |
dc.type | Article | - |
dc.identifier.wosid | 000264955900080 | - |
dc.identifier.scopusid | 2-s2.0-60849125734 | - |
dc.type.rims | ART | - |
dc.citation.volume | 48 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.identifier.doi | 10.1143/JJAP.48.026506 | - |
dc.embargo.liftdate | 9999-12-31 | - |
dc.embargo.terms | 9999-12-31 | - |
dc.contributor.localauthor | Nam, Chang Hee | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | GENERATION | - |
dc.subject.keywordPlus | LIGHT | - |
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