DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, DoHyun | - |
dc.date.accessioned | 2013-03-16T18:00:03Z | - |
dc.date.available | 2013-03-16T18:00:03Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2000-10 | - |
dc.identifier.citation | , v., no., pp.409 - 410 | - |
dc.identifier.uri | http://hdl.handle.net/10203/134031 | - |
dc.language | ENG | - |
dc.title | Electroless Deposition of Copper for Metallization in ULSI | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 409 | - |
dc.citation.endingpage | 410 | - |
dc.contributor.localauthor | Kim, DoHyun | - |
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