DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeong, J-H | - |
dc.contributor.author | Park, S-L | - |
dc.contributor.author | Seo, J-W | - |
dc.contributor.author | Gweon, Dae-Gab | - |
dc.date.accessioned | 2013-03-16T16:45:24Z | - |
dc.date.available | 2013-03-16T16:45:24Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-10 | - |
dc.identifier.citation | Int. Conf. on Mechatronic Technology, v., no., pp.327 - 329 | - |
dc.identifier.uri | http://hdl.handle.net/10203/133376 | - |
dc.language | ENG | - |
dc.title | A new design and kinematic analysis of 3-axis motion stage for ellipsometer | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 327 | - |
dc.citation.endingpage | 329 | - |
dc.citation.publicationname | Int. Conf. on Mechatronic Technology | - |
dc.identifier.conferencecountry | South Korea | - |
dc.identifier.conferencecountry | South Korea | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Jeong, J-H | - |
dc.contributor.nonIdAuthor | Park, S-L | - |
dc.contributor.nonIdAuthor | Seo, J-W | - |
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