Characteristics of tunneling nitride grown by electron cyclotron resonance nitrogen plasma nitridation and its application to low voltage EEPROM
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Kwyro | - |
| dc.contributor.author | Min, Kyeong-Sik | - |
| dc.date.accessioned | 2013-03-16T16:40:13Z | - |
| dc.date.available | 2013-03-16T16:40:13Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000 | - |
| dc.identifier.citation | Extended abstracts of the international conference on Solid-State Devices and Materials, v., no., pp.290 - 291 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/133319 | - |
| dc.language | ENG | - |
| dc.title | Characteristics of tunneling nitride grown by electron cyclotron resonance nitrogen plasma nitridation and its application to low voltage EEPROM | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 290 | - |
| dc.citation.endingpage | 291 | - |
| dc.citation.publicationname | Extended abstracts of the international conference on Solid-State Devices and Materials | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.identifier.conferencecountry | Japan | - |
| dc.contributor.localauthor | Lee, Kwyro | - |
| dc.contributor.nonIdAuthor | Min, Kyeong-Sik | - |
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.