Tunneling nitride insulator grown by electron cyclotron resonance nitrogen plasma nitridation for low-voltage EEPROM
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Kwyro | - |
| dc.contributor.author | Min, Kyeong-Sik | - |
| dc.contributor.author | Chung, Jin-Yong | - |
| dc.date.accessioned | 2013-03-16T16:35:04Z | - |
| dc.date.available | 2013-03-16T16:35:04Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001 | - |
| dc.identifier.citation | The 8th Korean Conference on Semiconductors, v., no., pp.15 - 16 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/133280 | - |
| dc.language | KOR | - |
| dc.title | Tunneling nitride insulator grown by electron cyclotron resonance nitrogen plasma nitridation for low-voltage EEPROM | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 15 | - |
| dc.citation.endingpage | 16 | - |
| dc.citation.publicationname | The 8th Korean Conference on Semiconductors | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Lee, Kwyro | - |
| dc.contributor.nonIdAuthor | Min, Kyeong-Sik | - |
| dc.contributor.nonIdAuthor | Chung, Jin-Yong | - |
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