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College of Engineering(공과대학)Dept. of Bio and Brain Engineering(바이오및뇌공학과)BiS-Conference Papers(학술회의논문)

Self-Diagnostic High-Density Silicon Microprobe Arrays Fabricated by the Corner Compensated Anisotropic Etching of (110) Silicon Wafers

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dc.contributor.authorSeo, Young Ho-
dc.contributor.authorLee, C-
dc.contributor.authorCho, Young-Ho-
dc.contributor.authorLee, K-
dc.date.accessioned2013-03-16T16:11:39Z-
dc.date.available2013-03-16T16:11:39Z-
dc.date.created2012-02-06-
dc.date.issued2002-07-22-
dc.identifier.citationPacific Rim Workshop on Transducers and Micro/Nano Technologies, v., no., pp.31 - 34-
dc.identifier.urihttp://hdl.handle.net/10203/133030-
dc.languageENG-
dc.titleSelf-Diagnostic High-Density Silicon Microprobe Arrays Fabricated by the Corner Compensated Anisotropic Etching of (110) Silicon Wafers-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage31-
dc.citation.endingpage34-
dc.citation.publicationnamePacific Rim Workshop on Transducers and Micro/Nano Technologies-
dc.identifier.conferencecountryChina-
dc.identifier.conferencecountryChina-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorSeo, Young Ho-
dc.contributor.nonIdAuthorLee, C-
dc.contributor.nonIdAuthorLee, K-
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BiS-Conference Papers(학술회의논문)
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