DC Field | Value | Language |
---|---|---|
dc.contributor.author | Seo, Young Ho | - |
dc.contributor.author | Lee, C | - |
dc.contributor.author | Cho, Young-Ho | - |
dc.contributor.author | Lee, K | - |
dc.date.accessioned | 2013-03-16T16:11:39Z | - |
dc.date.available | 2013-03-16T16:11:39Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-07-22 | - |
dc.identifier.citation | Pacific Rim Workshop on Transducers and Micro/Nano Technologies, v., no., pp.31 - 34 | - |
dc.identifier.uri | http://hdl.handle.net/10203/133030 | - |
dc.language | ENG | - |
dc.title | Self-Diagnostic High-Density Silicon Microprobe Arrays Fabricated by the Corner Compensated Anisotropic Etching of (110) Silicon Wafers | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 31 | - |
dc.citation.endingpage | 34 | - |
dc.citation.publicationname | Pacific Rim Workshop on Transducers and Micro/Nano Technologies | - |
dc.identifier.conferencecountry | China | - |
dc.identifier.conferencecountry | China | - |
dc.contributor.localauthor | Cho, Young-Ho | - |
dc.contributor.nonIdAuthor | Seo, Young Ho | - |
dc.contributor.nonIdAuthor | Lee, C | - |
dc.contributor.nonIdAuthor | Lee, K | - |
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