Self-Diagnostic High-Density Silicon Microprobe Arrays Fabricated by the Corner Compensated Anisotropic Etching of (110) Silicon Wafers
- Issue Date
- 2002-07-22
- Language
- ENG
- Citation
Pacific Rim Workshop on Transducers and Micro/Nano Technologies, pp.31 - 34
- Appears in Collection
- BiS-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.