Pressurized Cavity Array Design for Wafer-Level Hermetic MEMS Packaging

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dc.contributor.authorKang, Tae Goo-
dc.contributor.authorCho, Young-Ho-
dc.date.accessioned2013-03-16T16:11:31Z-
dc.date.available2013-03-16T16:11:31Z-
dc.date.created2012-02-06-
dc.date.issued2002-07-22-
dc.identifier.citationPacific Rim Workshop on Transducers and Micro/Nano Technologies, v., no., pp.79 - 82-
dc.identifier.urihttp://hdl.handle.net/10203/133029-
dc.languageENG-
dc.titlePressurized Cavity Array Design for Wafer-Level Hermetic MEMS Packaging-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage79-
dc.citation.endingpage82-
dc.citation.publicationnamePacific Rim Workshop on Transducers and Micro/Nano Technologies-
dc.identifier.conferencecountryChina-
dc.identifier.conferencecountryChina-
dc.contributor.localauthorCho, Young-Ho-
dc.contributor.nonIdAuthorKang, Tae Goo-
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BiS-Conference Papers(학술회의논문)
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