Mechanically Modulated Actuators and Branched Finger Detectors for Nano-Precision MEMS Applications
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, Won Chul | - |
| dc.contributor.author | Han, Ki-Ho | - |
| dc.contributor.author | Cho, Young-Ho | - |
| dc.date.accessioned | 2013-03-16T16:11:23Z | - |
| dc.date.available | 2013-03-16T16:11:23Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-10-16 | - |
| dc.identifier.citation | Inter. Conf. on Control, Automation and Systems (ICCAS-2002), v., no., pp.218 - 223 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/133028 | - |
| dc.language | ENG | - |
| dc.title | Mechanically Modulated Actuators and Branched Finger Detectors for Nano-Precision MEMS Applications | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 218 | - |
| dc.citation.endingpage | 223 | - |
| dc.citation.publicationname | Inter. Conf. on Control, Automation and Systems (ICCAS-2002) | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Cho, Young-Ho | - |
| dc.contributor.nonIdAuthor | Lee, Won Chul | - |
| dc.contributor.nonIdAuthor | Han, Ki-Ho | - |
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