PECVD 법으로 증착한 PZT박막의 fatigue 특성 및 누설전류 특성에 관한 연구

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Publisher
한국재료학회
Issue Date
2001-05
Language
Korean
Citation

한국재료학회 춘계학술발표대회, pp.0 - 0

URI
http://hdl.handle.net/10203/132036
Appears in Collection
MS-Conference Papers(학술회의논문)
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