기판에 수직으로 진동하는 다공 평판 미소구조물의 공기감쇠

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Issue Date
1999-04-17
Language
KOR
Citation

제1회 MEMS 학술대회, pp.115 - 120

URI
http://hdl.handle.net/10203/131756
Appears in Collection
BiS-Conference Papers(학술회의논문)
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