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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Microfabrication of 3D Oblique Structures by Inclined UV Lithography

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dc.contributor.authorHan, MH-
dc.contributor.authorLee, WS-
dc.contributor.authorLee, SK-
dc.contributor.authorLee, Seung Seob-
dc.date.accessioned2013-03-16T12:19:12Z-
dc.date.available2013-03-16T12:19:12Z-
dc.date.created2012-02-06-
dc.date.issued2002-11-
dc.identifier.citation6th Int. Int. Sym. on Miniaturized Systems for Chemistry and Life Science (micro-TAS’02), v., no., pp. --
dc.identifier.urihttp://hdl.handle.net/10203/131233-
dc.languageENG-
dc.titleMicrofabrication of 3D Oblique Structures by Inclined UV Lithography-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname6th Int. Int. Sym. on Miniaturized Systems for Chemistry and Life Science (micro-TAS’02)-
dc.identifier.conferencecountryJapan-
dc.identifier.conferencecountryJapan-
dc.contributor.localauthorLee, Seung Seob-
dc.contributor.nonIdAuthorHan, MH-
dc.contributor.nonIdAuthorLee, WS-
dc.contributor.nonIdAuthorLee, SK-
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ME-Conference Papers(학술회의논문)
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