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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Modeling and Implementation of a Real-Time Embedded Scheduler for CVD Cluster Tools

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dc.contributor.authorShin, Yong-Ho-
dc.contributor.authorKim, Ja-Hee-
dc.contributor.authorLee, Hwan-Yong-
dc.contributor.authorLee, Tae-Eog-
dc.date.accessioned2013-03-16T11:17:00Z-
dc.date.available2013-03-16T11:17:00Z-
dc.date.created2012-02-06-
dc.date.issued2000-05-
dc.identifier.citationModeling and Analysis of Semiconductor Manufacturing, v., no., pp.78 - 82-
dc.identifier.urihttp://hdl.handle.net/10203/130723-
dc.languageENG-
dc.titleModeling and Implementation of a Real-Time Embedded Scheduler for CVD Cluster Tools-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage78-
dc.citation.endingpage82-
dc.citation.publicationnameModeling and Analysis of Semiconductor Manufacturing-
dc.identifier.conferencecountryUnited States-
dc.identifier.conferencecountryUnited States-
dc.contributor.localauthorLee, Tae-Eog-
dc.contributor.nonIdAuthorShin, Yong-Ho-
dc.contributor.nonIdAuthorKim, Ja-Hee-
dc.contributor.nonIdAuthorLee, Hwan-Yong-
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IE-Conference Papers(학술회의논문)
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