Large Scale (Wafer Level) Nanopattern Generation of Templates For 10 nm Nanoimprint Lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Choi, Yang-Kyu | - |
| dc.date.accessioned | 2013-03-16T10:46:39Z | - |
| dc.date.available | 2013-03-16T10:46:39Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-12 | - |
| dc.identifier.citation | International Conference on Nanoimprint and Nanoprint Technology, v., no., pp.44 - 44 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/130502 | - |
| dc.language | ENG | - |
| dc.title | Large Scale (Wafer Level) Nanopattern Generation of Templates For 10 nm Nanoimprint Lithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 44 | - |
| dc.citation.endingpage | 44 | - |
| dc.citation.publicationname | International Conference on Nanoimprint and Nanoprint Technology | - |
| dc.contributor.localauthor | Choi, Yang-Kyu | - |
- Appears in Collection
- EE-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.