DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Yong Woo | ko |
dc.contributor.author | Ahn, Jin Hyung | ko |
dc.contributor.author | Ahn, Byung Tae | ko |
dc.date.accessioned | 2013-03-16T10:46:21Z | - |
dc.date.available | 2013-03-16T10:46:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-04-04 | - |
dc.identifier.citation | The 1999 MRS Spring Meeting - Symposium B 'Flat-Panel Displays and Sensors-Principles, Materials and Processes', pp.205 - 210 | - |
dc.identifier.issn | 0272-9172 | - |
dc.identifier.uri | http://hdl.handle.net/10203/130500 | - |
dc.language | English | - |
dc.publisher | MRS | - |
dc.title | Properties of polysilicon films oxidized in inductively coupled plasma and its effect on thin-film transistors | - |
dc.type | Conference | - |
dc.identifier.wosid | 000088056900029 | - |
dc.identifier.scopusid | 2-s2.0-0033721662 | - |
dc.type.rims | CONF | - |
dc.citation.beginningpage | 205 | - |
dc.citation.endingpage | 210 | - |
dc.citation.publicationname | The 1999 MRS Spring Meeting - Symposium B 'Flat-Panel Displays and Sensors-Principles, Materials and Processes' | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | San Francisco, CA, USA | - |
dc.contributor.localauthor | Ahn, Byung Tae | - |
dc.contributor.nonIdAuthor | Choi, Yong Woo | - |
dc.contributor.nonIdAuthor | Ahn, Jin Hyung | - |
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