Numerical analysis of uniformity optimization for rotating multi wafer by MOCVD process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lim, H. T. | - |
| dc.contributor.author | Ko, Seung Hwan | - |
| dc.contributor.author | Kim, C. J. | - |
| dc.date.accessioned | 2013-03-16T10:16:48Z | - |
| dc.date.available | 2013-03-16T10:16:48Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2002-11-01 | - |
| dc.identifier.citation | KSME Academy-Industry Joint Conference, v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/130246 | - |
| dc.language | KOR | - |
| dc.publisher | KSME | - |
| dc.title | Numerical analysis of uniformity optimization for rotating multi wafer by MOCVD process | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | KSME Academy-Industry Joint Conference | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.identifier.conferencecountry | South Korea | - |
| dc.contributor.localauthor | Ko, Seung Hwan | - |
| dc.contributor.nonIdAuthor | Lim, H. T. | - |
| dc.contributor.nonIdAuthor | Kim, C. J. | - |
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