Effects of Cu diffusion on MOSFET electrical propertiesEffects of Cu diffusion on MOSFET electrical properties
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Byung Jin | - |
| dc.contributor.author | Zhu, C | - |
| dc.contributor.author | Yoo, WJ | - |
| dc.contributor.author | Tan, DPP | - |
| dc.contributor.author | Lim, SY | - |
| dc.date.accessioned | 2013-03-16T10:12:08Z | - |
| dc.date.available | 2013-03-16T10:12:08Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-11-28 | - |
| dc.identifier.citation | 18th International VLSI Multilevel Interconnection Conf. (VMIC), v., no., pp.0 - 0 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/130204 | - |
| dc.language | ENG | - |
| dc.title | Effects of Cu diffusion on MOSFET electrical properties | - |
| dc.title.alternative | Effects of Cu diffusion on MOSFET electrical properties | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 0 | - |
| dc.citation.endingpage | 0 | - |
| dc.citation.publicationname | 18th International VLSI Multilevel Interconnection Conf. (VMIC) | - |
| dc.identifier.conferencecountry | United States | - |
| dc.identifier.conferencecountry | United States | - |
| dc.contributor.localauthor | Cho, Byung Jin | - |
| dc.contributor.nonIdAuthor | Zhu, C | - |
| dc.contributor.nonIdAuthor | Yoo, WJ | - |
| dc.contributor.nonIdAuthor | Tan, DPP | - |
| dc.contributor.nonIdAuthor | Lim, SY | - |
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