White light phase-shifting interferometry with self-compensation of PZT scanning errors

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dc.contributor.authorKim, Seung-Wooko
dc.contributor.authorKang, MGko
dc.contributor.authorLee, SYko
dc.date.accessioned2013-03-16T10:07:07Z-
dc.date.available2013-03-16T10:07:07Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1999-06-
dc.identifier.citationInternational Conference on Optical Engineering for Sensing and Nanotechnology(ICOSN'99), pp.16 - 19-
dc.identifier.urihttp://hdl.handle.net/10203/130169-
dc.languageEnglish-
dc.publisherICOSN-
dc.titleWhite light phase-shifting interferometry with self-compensation of PZT scanning errors-
dc.typeConference-
dc.identifier.wosid000083313900004-
dc.type.rimsCONF-
dc.citation.beginningpage16-
dc.citation.endingpage19-
dc.citation.publicationnameInternational Conference on Optical Engineering for Sensing and Nanotechnology(ICOSN'99)-
dc.identifier.conferencecountryJA-
dc.identifier.conferencelocationYamaguchi-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorKang, MG-
dc.contributor.nonIdAuthorLee, SY-
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ME-Conference Papers(학술회의논문)
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