Design and fabrication of integrated passive valves and pumps for flexible polymer 3-dimensional microfluidic systems

Abstract

This paper describes the fabrication of flexible, polymeric 3-dimensional microfluidic systems with integrated check valves (flap and diaphragm valves) and a pump by stacking patterned poly(dimethylsiloxane) (PDMS) layers containing microchannels and vias. We describe this procedure for fabricating, manipulating, and bonding of PDMS membranes and bas-relief plates into multilayer microfluidic devices. The fabrication and demonstration of integrated check valves and a pump in a prototype polymer 3-dimensional microfluidic system is a step toward practical realization of all-polymer, flexible, low-cost, disposable microfluidic devices for biochemical applications.