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Angle-resolved annular data acquisition method for microellipsometry Ye, SH; Kim, Soohyun; Kwak, Yoon Keun; Cho, HM; Cho, YJ; Chegal, W, OPTICS EXPRESS, v.15, no.26, pp.18056 - 18065, 2007-12 |
In-situ single wavelength ellipsometer for a vacuum chamber Chegal, Won; Ye, SH; Lee, YW; Kim, Soohyun; Kwak, Yoon Keun, International Society for Optical Engineering (SPIE), pp.15 - 18, SPIE, 2001-06 |
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