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Development of a focused-beam ellipsometer based on a new principle

Ye S.-H.; Kwak, Yoon Keun; Kim S.H.; Cho H.M.; Cho Y.J.; Chegal W., CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology, pp.69 - 73, 123, 2007-03-27

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