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The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing Loui, A.; Goericke, F. T.; Ratto, T. V.; Lee, Jungchul; Hart, B. R.; King, W. P., SENSORS AND ACTUATORS A-PHYSICAL, v.147, no.2, pp.516 - 521, 2008-10 |
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