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Femtosecond laser pulses for surface profile metrology Oh, J.S.; Kim, Seung-Woo, KAIST-NMIJ Joint Workshop 2006 on Precision Metrology, pp.14 -, 2006-12 |
State-of-the-art of the laser interferometers for displacement measurement Oh, J.S.; Kim, Seung-Woo, Proceedings of Korea-Japan Joint Symposium on Nanoengineering 2003, pp.107 - 107, 2003 |
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