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JMEMS Letters Thick Germanium-on-Nothing Structures by Annealing Microscale Hole Arrays With Straight Sidewall Profiles Jeong, Mun Goung; Kim, Taeyeong; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.31, no.2, pp.183 - 185, 2022-04 |
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