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3D Simulator of integrated single-wafer processing tools = 매엽식 반도체 통합제조장비 시뮬레이터link Kim, Woo-Suk; 김우석; et al, 한국과학기술원, 2004 |
Online scheduling of integrated single-wafer processing tools with temporal constraints Yoon, HJ; Lee, Doo Yong, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.18, pp.390 - 398, 2005-08 |
Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing Yim, SJ; Lee, Doo Yong, JOURNAL OF INTELLIGENT MANUFACTURING, v.10, no.6, pp.531 - 540, 1999-06 |
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