Browse "Dept. of Mechanical Engineering(기계공학과)" by Subject precision stage

Showing results 1 to 4 of 4

1
Alignment of laboratory-scale soft X-ray microscope using laser plasma

Kang, Dong-Woo; Kang, Sung-Hoon; Kwon, Young-Man; Kim, Kyong-Woo; Yoo, Hongki; Kim, Tac-Hun; Gweon, Dae-Gab; et al, JAPANESE JOURNAL OF APPLIED PHYSICS, v.46, no.1, pp.394 - 399, 2007-01

2
Design and control of flexure based XY theta(z) stage

Kang, D; Kim, K; Choi, Y; Gweon, Dae-Gab; Lee, S; Lee, M, JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.19, no.11, pp.2157 - 2164, 2005-11

3
Design of a Rectangular-Type Voice Coil Actuator for Frame Vibration Compensation

Choi, Young-Man; Ahn, Dahoon; Gweon, Dae-Gab; Lee, Moon Gu, JOURNAL OF MAGNETICS, v.21, no.3, pp.348 - 355, 2016-09

4
나노 정밀도를 갖는 다축 수직형 마스크 얼라이너의 설계 및 제어에 관한 연구 = Design and Control of a Nano-Precision Multi-Axis Vertical Mask Alignerlink

김효영; Kim, Hyo-Young; et al, 한국과학기술원, 2009

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