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A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage Kim, Myeong-Hyeon; Jeong, Jae Heon; Kim, HyoYoung; Gweon, Dae-Gab, SMART MATERIALS AND STRUCTURES, v.24, no.10, 2015-10 |
VCM을 이용한 wafer용 xyθ 미세구동기의 설계와 제어 = The design and control of xyθ fine stage using VCM for wafer stagelink 김동민; Kim, Dong-Min; et al, 한국과학기술원, 2002 |
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