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Frequency tuning characteristics of multi-layered micro-resonators using thermal and piezoelectric actuation Oh, Il-Kwon; Kim, D.-H., KEY ENGINEERING MATERIALS, v.324-325 I, no.0, pp.647 - 650, 2006-11 |
Laterally-driven electrostatic attractive- and repulsive-force microactuators for frequency tuning and quality-factor control = 주파수 및 감쇠계수 조정이 가능한 정전인력 및 정전반발력 수평구동형 마이크로액츄에이터link Lee, Ki-Bang; 이기방; et al, 한국과학기술원, 2000 |
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