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Browse "Dept. of Mechanical Engineering(기계공학과)" by Subject 3-D integrated circuits▼aEllipsometry▼aMachine learning▼aTime-of-flight▼aFemtosecond pulse laser▼aSurface profilometry▼aLine-scan camera

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삼차원 반도체 소자의 다층 두께 및 표면 형상 측정 방법 = Multilayer thickness characterization and surface profilometry of three-dimensional semiconductor deviceslink

곽현수; 김정원; et al, 한국과학기술원, 2023

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