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Fabrication of a ZnO piezoelectric micro cantilever with a high-aspect-ratio nano tip Lee, SH; Lee, Seung Seob; Choi, JJ; Jeon, JU; Ro, K, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.11, no.6, pp.416 - 423, 2005-05 |
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