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Compact compliant parallel XY nano-positioning stage with high dynamic performance, small crosstalk, and small yaw motion Lee, Hak Jun; Woo, Siwoong; Park, Jae Hyun; Jeong, Jae Heon; Kim, Myeonghyeon; Ryu, Jiheun; Gweon, Dae-Gab; et al, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.24, no.6, pp.2653 - 2662, 2018-06 |
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