Showing results 1 to 1 of 1
A stage based on voice coil motor with high speed and long range for laser micro/nano fabrication Kim K.; Gweon, Dae-Gab; Jung H.S.; Lee S.-H.; Hong M.-S.; Lee M.G., Key Engineering Materials, v.345-346 I, pp.757 - 760, 2007-08 |
Discover