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Multipoint process monitoring system based on an acousto-optic tunable filter (AOTF) Kim D.; Jang WY; Kim, Soohyun; Hong JK; Lee Y.; Chegal W.; Kwak, Yoon Keun, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), pp.202 - 206, SPIE, 2001-06-06 |
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