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Design and Evaluation of Two Dimensional Metrological Atomic Force Microscope using a Planar Nanoscanner Lee, DY; Kim, DM; Gweon, Dae-Gab, 13th International Conference, 2005-07-08 |
Optimal design of high stiffness XYZ 3-axis stage for AFM system Gweon, Dae-Gab; Kim, DM; Kang, DW; Shim, JY; Eom, Cheonil, ASPE 2003 Anual meeting, 2003-10-30 |
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