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Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry Kim, Seung-Woo; Kim, GH, APPLIED OPTICS, v.38, no.28, pp.5968 - 5973, 1999-10 |
Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height Lu, Xing; Zhang, Shuangyou; Jeon, Chan-Gi; Kang, Chu-Shik; Kim, Jungwon; Shi, Kebin, OPTICS LETTERS, v.43, no.7, pp.1447 - 1450, 2018-04 |
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