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Time-of-flight detection of femtosecond laser pulses for precise measurement of large microelectronic step height

Lu, Xing; Zhang, Shuangyou; Jeon, Chan-Gi; Kang, Chu-Shik; Kim, Jungwon; Shi, Kebin, OPTICS LETTERS, v.43, no.7, pp.1447 - 1450, 2018-04

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