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Multiscale Fluidic Channels via Internal Oxidation and Oxide Etching of Self-Assembled Silicon-on-Nothing Structures Je, Jinsol; Song, Jungki; Lee, Bong Jae; Lee, Jungchul, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.28, no.5, pp.865 - 868, 2019-10 |
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