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Online scheduling of integrated single-wafer processing tools with temporal constraints Yoon, HJ; Lee, Doo Yong, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.18, pp.390 - 398, 2005-08 |
Real-time scheduling of wafer fabrication with multiple product types Yoon, HJ; Lee, Doo Yong, 1999 IEEE International Conference on Systems, Man, and Cybernetics 'Human Communication and Cybernetics', v.1, pp.835 - 840, 1999-10-12 |
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