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6
In-situ single wavelength ellipsometer for a vacuum chamber

Chegal, Won; Ye, SH; Lee, YW; Kim, Soohyun; Kwak, Yoon Keun, International Society for Optical Engineering (SPIE), pp.15 - 18, SPIE, 2001-06

7
Non-destructive surface profile measurement of a thin film deposited on a patterned sample

Kim, DS; Chegal, Won; Kim, Soohyun; Kong, HJ; Lee, YW, 2003 International Conference on Characterization and Metrology for ULSI Technology, pp.357 - 361, American Institute of Physics, 2003-09-30

8
One-dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer

Chegal, W; Kim, DS; Kim, Soohyun; Cho, YJ; Cho, HM; Lee, YW, 2003 International conference for Characterization and Metrology for ULSI Technology, 2003-06-24

9
Peak movement detection method of an equally spaced fringe for precise position measurement

Yi, JH; Kim, Soohyun; Kwak, YK; Lee, YW, OPTICAL ENGINEERING, v.41, no.2, pp.428 - 434, 2002-02

10
The KSTAR project: An advanced steady state superconducting tokamak experiment

Lee, GS; Kim, J; Hwang, SM; Chang, Choong-Seock; Chang, Hong-Young; Cho, MH; Choi, BH; et al, NUCLEAR FUSION, v.40, pp.575 - 582, 2000-03

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