Showing results 2 to 4 of 4
Optimal calibration for rotating analyzer ellipsometer Park, S; Gweon, Dae-Gab, JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.19, no.11, pp.2165 - 2171, 2005-11 |
Precision auto-alignment for incident angle of an ellipsometer using specimen stage Park, S; Gweon, Dae-Gab; Kim, YD, THIN SOLID FILMS, v.455, pp.72 - 77, 2004-05 |
단축 결상 분광기를 이용한 분광 결상 타원계측기 = Spectral imaging ellipsometer with mono axial power spectrographlink 제갈원; Che, Gal-Won; et al, 한국과학기술원, 2003 |
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